The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2021
Filed:
Oct. 18, 2018
International Business Machines Corporation, Armonk, NY (US);
Pablo Nieves, Schenectady, NY (US);
Kushagra Sinha, Wappingers Falls, NY (US);
Reinaldo Vega, Mahopac, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A test probe assembly includes a probe card, a plurality of test probes mounted to the probe card with each of the test probes having a probe tip segment and a probe end for positioning adjacent respective individual test pads of a semiconductor wafer, and a fiber optic lead mounted to each test probe. The fiber optic leads are arranged to direct incident light toward respective individual test pads of the semiconductor wafer. A plurality of photodetectors may be arranged about the probe card with individual photodetectors configured for reception of light reflected off the respective individual test pads to emit output signals used to generate image data representative of the individual test pads on the semiconductor wafer. The image data may be utilized to align the test pads with the test probes for subsequent testing.