The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 14, 2021

Filed:

Apr. 17, 2019
Applicant:

The Curators of the University of Missouri, Columbia, MO (US);

Inventors:

Mahmoud Almasri, Columbia, MO (US);

Edward Kinzel, Columbia, MO (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/20 (2006.01); G01J 5/58 (2006.01); H01L 27/16 (2006.01); H01L 37/02 (2006.01);
U.S. Cl.
CPC ...
G01J 5/20 (2013.01); G01J 5/58 (2013.01); H01L 27/16 (2013.01); H01L 37/025 (2013.01);
Abstract

A metasurface integrated microbolometer having a sensing layer (e.g., SiGeO). The presence of the metasurface provides selectivity with respect to wavelength, polarization and angle-of-incidence. The presence of the metasurface into the microbolometer affects conversion of electromagnetic to thermal energy, thermal response, electrical integration of the microbolometer, and the tradeoff between resistivity and temperature coefficient of resistance, thereby allowing the ability to obtain a sensing with high temperature coefficient of resistance with lower resistivity values than that of films without the metasurface. The presence of the metasurface removes the need for a Fabry-Perot cavity.


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