The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2021
Filed:
Nov. 13, 2018
Applicant:
Tes Co., Ltd, Gyeonggi-do, KR;
Inventors:
Hong-Jae Lee, Gyeonggi-do, KR;
Jong-Hwan Kim, Chungcheongnam-do, KR;
Woo-Pil Shim, Gyeonggi-do, KR;
Woo-Jin Lee, Busan, KR;
Sung-Yean Yoon, Gyeonggi-do, KR;
Don-Hee Lee, Gyeonggi-do, KR;
Assignee:
TES CO., LTD, Yongin, KR;
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); C23C 16/455 (2006.01); H01L 51/56 (2006.01); C23C 16/505 (2006.01); H01L 33/44 (2010.01); H01L 33/00 (2010.01); H01L 33/02 (2010.01); H01L 51/52 (2006.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C23C 16/345 (2013.01); C23C 16/401 (2013.01); C23C 16/403 (2013.01); C23C 16/45523 (2013.01); C23C 16/45555 (2013.01); C23C 16/505 (2013.01); H01L 33/00 (2013.01); H01L 33/005 (2013.01); H01L 33/02 (2013.01); H01L 33/44 (2013.01); H01L 51/5253 (2013.01); H01L 51/56 (2013.01); H01L 51/5256 (2013.01); H01L 2251/56 (2013.01); H01L 2933/0025 (2013.01);
Abstract
The present invention relates to a method for depositing a protection film of a light-emitting element, the method comprising the steps of: depositing a first protection layer on a light-emitting element of a substrate by means of the atomic layer deposition method; and depositing at least one additional protection layer on the first protection layer by means of the plasma-enhanced chemical vapor deposition method.