The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 14, 2021

Filed:

Jul. 04, 2018
Applicants:

Hefei Xinsheng Optoelectronics Technology Co., Ltd., Anhui, CN;

Boe Technology Group Co., Ltd., Beijing, CN;

Inventors:

Bo Mao, Beijing, CN;

Changjun Jiang, Beijing, CN;

Jun Li, Beijing, CN;

Langlang Ha, Beijing, CN;

Yikun Dou, Beijing, CN;

Yang Xu, Beijing, CN;

Mengyu Luan, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/04 (2006.01); C23C 14/32 (2006.01); C23C 14/54 (2006.01); H01L 51/50 (2006.01); H01L 51/52 (2006.01); H01L 51/56 (2006.01); C23C 14/24 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); C23C 14/048 (2013.01); C23C 14/24 (2013.01); C23C 14/325 (2013.01); C23C 14/543 (2013.01); C23C 14/548 (2013.01); H01L 51/5012 (2013.01); H01L 51/52 (2013.01); H01L 51/5253 (2013.01); H01L 51/56 (2013.01); H01L 51/001 (2013.01);
Abstract

The present disclosure provides an evaporation device and an evaporation method. The evaporation device includes: an evaporation chamber; a plurality of spaced conductive baffles disposed in the evaporation chamber and dividing the evaporation chamber into a plurality of evaporation sub-chambers, the conductive baffles configured to carry charges of a first polarity; an evaporation source disposed in at least one of the evaporation sub-chambers; and a particle charging circuit disposed in at least one of the evaporation sub-chambers. The particle charging circuit is configured to control evaporation material particles generated from the evaporation source in at least one of the evaporation sub-chambers to have charges of the first polarity.


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