The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 14, 2021

Filed:

Jan. 11, 2018
Applicant:

Center for Advanced Soft Electronics, Pohang-si, KR;

Inventors:

Kilwon Cho, Pohang-si, KR;

Min Seok Yoo, Pohang-si, KR;

Hyo Chan Lee, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 32/182 (2017.01); C01B 32/186 (2017.01); C23C 14/34 (2006.01); C23C 16/26 (2006.01); C23C 16/04 (2006.01); C23C 16/02 (2006.01);
U.S. Cl.
CPC ...
C01B 32/186 (2017.08); C23C 14/3442 (2013.01); C23C 16/0281 (2013.01); C23C 16/04 (2013.01); C23C 16/26 (2013.01); C01B 2204/04 (2013.01);
Abstract

Disclosed is a method of synthesizing graphene, wherein a Cu—Ni thin film laminate including a copper thin film and a nickel thin film formed thereon is placed in a chemical vapor depositor, brought into contact with a graphene precursor and subjected to chemical vapor deposition (CVD), thus synthesizing thickness-controlled graphene on the copper thin film, whereby the thickness of multilayer graphene can be easily and reproducibly controlled by adjusting only nickel thickness and CVD time, and a process window for obtaining reproducible results can be widened due to self-limiting properties whereby the maximum thickness of graphene is obtained after a certain synthesis time due to the thickness-controlled nickel thin film. Also, carbon atoms absorbed to the nickel thin film reach the copper thin film opposite thereto through internal diffusion of the metal laminate to thus grow graphene via surface-mediated reaction thereon, thereby improving the uniformity of synthesized graphene.


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