The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2021
Filed:
Aug. 08, 2018
Applicants:
National University Corporation Shizuoka University, Shizuoka, JP;
Saginomiya Seisakusho, Inc., Tokyo, JP;
Inventors:
Gen Hashiguchi, Hamamatsu, JP;
Hideaki Koga, Sayama, JP;
Assignees:
National University Corporation Shizuoka University, Shizuoka, JP;
Saginomiya Seisakusho, Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81B 7/02 (2006.01); H04R 19/01 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0078 (2013.01); B81B 7/02 (2013.01); H04R 19/016 (2013.01);
Abstract
A MEMS vibration element includes: a base unit; a fixed unit fixed to the base unit; a movable unit that is movable relative to the fixed unit; and an elastic support unit that elastically supports the movable unit at the base unit. The elastic support unit is made of a material different from a material of the fixed unit and the movable unit.