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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11117086 B1

PDFFull Text
Date of Patent:
Sep. 14, 2021

Filed:

Nov. 07, 2019

Apparatus for collecting by-product of semiconductor manufacturing process

Applicant:

Milaebo Co., Ltd., Pyeongtaek-si, KR;

Inventors:

Che Hoo Cho, Seongnam-si, KR;

Jae Jun Lee, Hwaseong-si, KR;

Myung Pil Han, Yongin-si, KR;

Assignee:

MILAEBO CO., LTD., Pyeongtaek-si, KR;

Attorney:

Rabin & Berdo, P.C.

Primary Examiner:

Dung H Bui

Int. Cl.
CPC ...
B01D 50/00 (2006.01); C23C 16/44 (2006.01); B01D 46/24 (2006.01); B01D 45/08 (2006.01); H01L 21/67 (2006.01); B08B 15/02 (2006.01);
U.S. Cl.
CPC ...
B01D 50/002 (2013.01); B01D 45/08 (2013.01); B01D 46/24 (2013.01); C23C 16/4412 (2013.01); B08B 15/023 (2013.01); H01L 21/67017 (2013.01); H01L 21/67207 (2013.01);
Abstract

The apparatus for collecting by-products of the present disclosure includes: a cylindrical housing that has a top plate having a gas inlet and a bottom plate having a gas outlet extending and protruding inside the housing, and receives and then discharges an exhaust gas flowing inside; and a flow path change-type vertical internal collection tower that is installed in a hanging state inside the housing and includes a disc type collector, a diffusion plate, a cylindrical collector, and a cylindrical filter collector for collecting by-products in an exhaust gas flowing inside.

Find Patent Forward Citations

Cho, Che. (2021). Apparatus for collecting by-product of semiconductor manufacturing process (U.S. Patent No. 11117086). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11117086

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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