The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2021
Filed:
Aug. 25, 2019
Applicant:
Birad—research & Development Company Ltd., Ramat Gan, IL;
Inventors:
Joseph Shor, Tel Mond, IL;
Liron Lisha, Petach Tikva, IL;
Assignee:
Birad—Research & Development Company Ltd., Ramat Gan, IL;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 22/34 (2013.01); H01L 21/67253 (2013.01); H01L 22/14 (2013.01);
Abstract
A process monitor circuitry is described that can measure the electron mobility (μ), oxide capacitance (C) and threshold voltage (V) of an integrated circuit.