The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 07, 2021

Filed:

Sep. 15, 2017
Applicant:

Nissan Chemical Corporation, Tokyo, JP;

Inventors:

Yuto Hashimoto, Toyama, JP;

Hikaru Tokunaga, Toyama, JP;

Hiroto Ogata, Toyama, JP;

Tomoya Ohashi, Toyama, JP;

Yasushi Sakaida, Toyama, JP;

Takahiro Kishioka, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/11 (2006.01); C08F 220/14 (2006.01); C08G 59/32 (2006.01); C08G 59/62 (2006.01); C09D 133/12 (2006.01); C09D 163/06 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C08F 220/14 (2013.01); C08G 59/3245 (2013.01); C08G 59/628 (2013.01); C09D 133/12 (2013.01); C09D 163/06 (2013.01); H01L 21/0273 (2013.01);
Abstract

A composition for forming protective films against aqueous hydrogen peroxide solutions, including: a compound of the following formula (1a) or formula (1b) or a compound having a substituent of the following formula (2) and having a molecular weight of 300 or more and less than 800 or a weight-average molecular weight of 300 or more and less than 800; and a solvent, the composition containing the compound of the formula (1a) or formula (1b) of 0.1% by mass to 60% by mass or the compound having the substituent of the formula (2) of 10% by mass to 100% by mass, relative to solids excluding the solvent: (wherein Ris a Calkylene or alkenylene group or a direct bond, k is 0 or 1, m is an integer of 1 to 3, and n is an integer of 2 to 4.)


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