The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 07, 2021

Filed:

Jul. 05, 2018
Applicant:

Ramot AT Tel-aviv University Ltd., Tel-Aviv, IL;

Inventors:

Gil Shalev, Ramat-HaSharon, IL;

Yossi Rosenwaks, Hod-HaSharon, IL;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 33/551 (2006.01); G01N 27/414 (2006.01); G01N 33/543 (2006.01); G01N 27/12 (2006.01); G01N 27/30 (2006.01); H01L 21/22 (2006.01); H01L 21/324 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4145 (2013.01); G01N 27/12 (2013.01); G01N 27/30 (2013.01); G01N 27/4146 (2013.01); G01N 33/54373 (2013.01); H01L 21/22 (2013.01); H01L 21/324 (2013.01); G01N 33/551 (2013.01);
Abstract

The present invention provides a method and a system based on a multi-gate field effect transistor for sensing molecules in a gas or liquid sample. The said FET transistor comprises dual gate lateral electrodes (and optionally a back gate electrode) located on the two sides of an active region, and a sensing surface on top of the said active region. Appling voltages to the lateral gate electrodes, creates a conductive channel in the active region, wherein the width and the lateral position of the said channel can be controlled. Enhanced sensing sensitivity is achieved by measuring the channels conductivity at a plurality of positions in the lateral direction. The use of an array of the said FTE for electronic nose is also disclosed.


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