The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 07, 2021

Filed:

Oct. 17, 2017
Applicant:

Toppan Printing Co., Ltd., Tokyo, JP;

Inventors:

Naoko Mikami, Tokyo, JP;

Sumika Tamura, Tokyo, JP;

Reiji Terada, Tokyo, JP;

Masashi Kurata, Tokyo, JP;

Daisei Fujito, Tokyo, JP;

Kiyoaki Nishitsuji, Tokyo, JP;

Takehiro Nishi, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/28 (2006.01); C23C 14/24 (2006.01); C23C 14/34 (2006.01); C23F 1/16 (2006.01); B21B 1/22 (2006.01); B21B 3/02 (2006.01); B32B 15/01 (2006.01); B32B 15/04 (2006.01); C23C 14/04 (2006.01); C23C 16/04 (2006.01); C23F 1/40 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23F 1/28 (2013.01); B21B 1/227 (2013.01); B21B 3/02 (2013.01); B32B 15/015 (2013.01); B32B 15/04 (2013.01); C23C 14/042 (2013.01); C23C 14/24 (2013.01); C23C 14/34 (2013.01); C23C 16/042 (2013.01); C23F 1/16 (2013.01); C23F 1/40 (2013.01); H01L 51/0015 (2013.01); B21B 2261/04 (2013.01);
Abstract

A rolled metal sheet includes an obverse surface and a reverse surface that is a surface located opposite to the obverse surface. At least either one of the obverse surface and the reverse surface is a processing object. A method for manufacturing a metal mask substrate includes reducing a thickness of the rolled metal sheet to 10 μm or less by etching the processing object by 3 μm or more by use of an acidic etching liquid, and roughening the processing object so that the processing object becomes a resist formation surface that has a surface roughness Rz of 0.2 μm or more, thereby obtaining a metal mask sheet.


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