The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2021
Filed:
Jan. 30, 2020
Applicant:
Kyocera Corporation, Kyoto, JP;
Inventors:
Assignee:
KYOCERA Corporation, Kyoto, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/08 (2006.01); H01L 21/3065 (2006.01); C30B 25/10 (2006.01); C30B 25/00 (2006.01); C30B 28/12 (2006.01); C30B 28/14 (2006.01); C30B 29/16 (2006.01); C30B 29/02 (2006.01); C30B 28/00 (2006.01); C30B 29/22 (2006.01);
U.S. Cl.
CPC ...
C23C 14/083 (2013.01); H01L 21/3065 (2013.01); C30B 25/00 (2013.01); C30B 25/10 (2013.01); C30B 28/00 (2013.01); C30B 28/12 (2013.01); C30B 28/14 (2013.01); C30B 29/02 (2013.01); C30B 29/16 (2013.01); C30B 29/22 (2013.01); Y10T 428/12611 (2015.01); Y10T 428/12618 (2015.01);
Abstract
A component includes a film containing polycrystalline yttrium oxide. In an X-ray diffraction pattern of the film, a ratio I/Iof a maximum intensity Iof a peak attributed to monoclinic yttrium oxide to a maximum intensity Iof a peak attributed to cubic yttrium oxide satisfies an expression: 0≤I/I≤0.002.