The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2021
Filed:
Nov. 25, 2019
Applicant:
Japan Display Inc., Tokyo, JP;
Inventors:
Assignee:
Japan Display Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/02 (2006.01); C23C 14/04 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); H01L 51/0011 (2013.01);
Abstract
A vapor deposition mask includes a frame and a metal film supported by the frame, wherein the metal film includes a mask region arranged with a plurality of pixel opening parts corresponding to a display region of a display device, and an alignment region arranged in a periphery of the mask region, the alignment region includes a first opening part and a plurality of second opening parts arranged in a periphery of the first opening part, and a maximum width of the second opening part is smaller than a maximum width of the first opening part.