The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2021
Filed:
Dec. 16, 2016
Jiangsu Nata Opto-electronic Materials Co. Ltd., Jiangsu, CN;
Barry M. Ketola, Freeland, MI (US);
Jesse A. Maddock, Midland, MI (US);
Brian D. Rekken, Midland, MI (US);
Michael D. Telgenhoff, Midland, MI (US);
Xiaobing Zhou, Midland, MI (US);
Jiangsu Nata Opto-Electronic Materials Co. Ltd., Jiangsu Province, CN;
Abstract
A composition, comprising: trisilylamine and less than 5 ppmw of halogen. A method of making a silylamine comprising combining ammonia and a compound comprising aminosilane functionality, where the compound comprising aminosilane functionality is according to formula (I) RN(R)a(SiH)(I), where Ris an organic polymer, a C-hydrocarbyl group or —SiR, where Ris Chydrocarbyl, Ris a C-hydrocarbyl group, H, or —SiR, where Ris as defined above, subscript a is 0 or 1, provided that Rand Rmay be the same or different except if Ris phenyl, Ris not phenyl, under sufficient conditions to cause a reaction to form a silylamine and a byproduct.