The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2021
Filed:
Jul. 26, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jared Ahmad Lee, San Jose, CA (US);
Sanjeev Baluja, Campbell, CA (US);
Joseph AuBuchon, San Jose, CA (US);
Dhritiman Subha Kashyap, Bangalore, IN;
Michael Rice, Pleasanton, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); B01J 8/18 (2006.01); B01J 4/00 (2006.01);
U.S. Cl.
CPC ...
B01J 8/1818 (2013.01); H01J 37/32449 (2013.01); B01J 4/001 (2013.01);
Abstract
Apparatus and methods for providing high velocity gas flow showerheads for deposition chambers are described. The showerhead has a faceplate in contact with a backing plate that has a concave portion to provide a plenum between the backing plate and the faceplate. A plurality of thermal elements is within the concave portion of the backing plate and extends to contact the faceplate.