The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2021
Filed:
Oct. 29, 2018
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Makiko Hino, Matsumoto, JP;
Yasushi Mizoguchi, Suwa, JP;
Assignee:
SEIKO EPSON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 2/00 (2006.01); H02N 2/10 (2006.01); F16F 15/02 (2006.01); G03B 21/20 (2006.01); G02B 5/02 (2006.01); G02B 27/48 (2006.01); B81B 3/00 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
H02N 2/008 (2013.01); B81B 3/0078 (2013.01); F16F 15/02 (2013.01); G02B 5/02 (2013.01); G02B 27/48 (2013.01); G03B 21/2033 (2013.01); H02N 2/001 (2013.01); H02N 2/103 (2013.01); H01L 41/09 (2013.01);
Abstract
At least one of a first beam portion and second beam portions is provided with an out-of-plane vibration suppressing structure configured to suppress vibration of a movable portion in an out-of-plane direction vertical to an in-plane direction. Thus, unintentional occurrence of unintentional movement in the out-of-plane direction vertical to the in-plane direction can be suppressed. Furthermore, in this case, a size reduction of a device can be achieved in comparison with a case where a device includes a motor disposed for rotation driving, for example.