Metal-oxide semiconductor for field-effect transistor having enhanced high-frequency performance

Abstract

An LDMOS device includes a doped drift region of a first conductivity type formed on an upper surface of a substrate having a second conductivity type. A body region of the second conductivity type is formed proximate an upper surface of the doped drift region. Source and drain regions of the first conductivity type are formed proximate an upper surface of the body region and doped drift region, respectively, and spaced laterally from one another. A gate is formed over the body region and between the source and drain regions. The gate is formed on a first insulating layer for electrically isolating the gate from the body region. A shielding structure is formed over at least a portion of the doped drift region on a second insulating layer. The gate and shielding structure are spaced laterally from one another to thereby reduce parasitic gate-to-drain capacitance.