The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 31, 2021

Filed:

Feb. 24, 2014
Applicant:

Ams Ag, Unterpremstaetten, AT;

Inventors:

Hubert Enichlmair, Weinitzen, AT;

Franz Schrank, Graz, AT;

Joerg Siegert, Graz, AT;

Assignee:

AMS AG, Unterpremstaetten, AT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01); H01L 23/48 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14621 (2013.01); H01L 23/481 (2013.01); H01L 27/14618 (2013.01); H01L 27/14632 (2013.01); H01L 27/14636 (2013.01); H01L 27/14685 (2013.01); H01L 27/14687 (2013.01); H01L 2224/02372 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/05548 (2013.01); H01L 2224/13024 (2013.01);
Abstract

The semiconductor device for detection of radiation comprises a semiconductor substrate () with a main surface (), a dielectric layer () comprising at least one compound of a semiconductor material, an integrated circuit () including at least one component sensitive to radiation (), a wiring () of the integrated circuit embedded in an intermetal layer () of the dielectric layer (), an electrically conductive through-substrate via () contacting the wiring, and an optical filter element () arranged immediately on the dielectric layer above the component sensitive to radiation. The dielectric layer comprises a passivation layer () at least above the through-substrate via, the passivation layer comprises a dielectric material that is different from the intermetal layer (), and the wiring is arranged between the main surface and the passivation layer.


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