The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2021
Filed:
Apr. 23, 2018
Rorze Corporation, Hiroshima, JP;
Katsunori Sakata, Fukuyama, JP;
Abstract
Provided is holding fingerwith which a thin-plate substrate W that has been subjected to surface processing can be transferred without generating a natural oxide film on a surface to be processed of the thin-plate substrate W. The holding fingercomprises: a finger bodywhich is internally formed with a flow path for circulating an inert gas; a pipe member which provides communication between an inert gas supply source and the flow path; an ejection port for ejecting the inert gas onto the surface to be processed of the thin-plate substrate W, the ejection port communicating with the flow path and being disposed on a surface of the finger bodyopposing the surface to be processed of the thin-plate substrate W; an abutting memberwhich is disposed on the surface of the finger bodyon which the ejection port is formed, and which abuts a peripheral portion of the thin-plate substrate W; a clamp memberwhich is disposed to be movable forward and backward with respect to the thin-plate substrate W; and a clamp mechanism for the clamp memberforward and backward.