The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 31, 2021

Filed:

Dec. 11, 2018
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Keiko Abe, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 1/113 (2015.01); G02B 1/118 (2015.01);
U.S. Cl.
CPC ...
G02B 1/113 (2013.01); G02B 1/118 (2013.01); G02B 2207/107 (2013.01);
Abstract

A related-art optical element using an antireflection film having a layer having an uneven structure or a porous layer has involved a problem in that the performance of the antireflection film is degraded by SOin an exhaust gas. In view of the problem, provided are an optical element in which a positive ion spectrum of a surface of an antireflection film measured by TOF-SIMS has a peak of CHN, where m represents an integer of 1 or more to 8 or less, and n represents an integer of 2 or more to 16 or less, and a method of producing the element.


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