The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2021
Filed:
Jan. 28, 2019
Senodia Technologies (Shaoxing) Co., Ltd., Shaoxing, CN;
Bo Zou, Shanghai, CN;
Qinglong Zheng, Shanghai, CN;
SENODIA TECHNOLOGIES (SHAOXING) CO., LTD., Shaoxing, CN;
Abstract
A MEMS accelerometer, including: a substrate, a movable component and a fixed electrode group, wherein a surface of the substrate has an anchoring region; the movable component is connected to the anchoring region through a supporting beam and suspended above the substrate, and the movable component includes a first proof mass and a second proof mass; the first proof mass has a first hollowed-out region in the middle, the first hollowed-out region is I-shaped, and the second proof mass is located in the first hollowed-out region; and the fixed electrode group includes a first electrode group, which is fixed on the surface of the substrate, located between the substrate and the movable component, and forms a Z-axis detection capacitor bank with the first proof mass and the second proof mass.