The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2021
Filed:
Jul. 16, 2019
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Matti Liukku, Helsinki, FI;
Ville-Pekka Rytkönen, Klaukkala, FI;
MURATA MANUFACTURING CO., LTD., Nagaokakyo, JP;
Abstract
The disclosure relates to a microelectromechanical device where the device structure includes a rotating mass structure and a linear mass structure. The rotating mass structure is formed of two rotating mass parts elastically coupled to the support through one or more springs that enable rotary motion of each of the rotating mass parts about respective rotary axes that extend parallel to each other along a first in-plane direction (IP). The linear mass structure includes at least one elongate rigid body that extends in a second in-plane direction (IP). One end of the linear mass structure is coupled to the first rotating mass part and the other end of the linear mass structure is coupled to the second rotating mass part such that rotary motions of the first and second masses result into linear motion of the linear mass structure in the out-of-plane direction (OP).