The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 31, 2021

Filed:

Sep. 27, 2018
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Kazuyuki Nagata, Minowa, JP;

Takayuki Kikuchi, Chino, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5747 (2012.01); G01C 19/5649 (2012.01);
U.S. Cl.
CPC ...
G01C 19/5747 (2013.01); G01C 19/5649 (2013.01);
Abstract

A physical quantity sensor includes a drive vibrator, a detection vibrator, and an elastic deformation portion disposed between the drive vibrator and the detection vibrator and elastically deformable along a first axis in which the drive vibrator and the detection vibrator are aligned, in plan view, and in which the drive vibrator and the detection vibrator vibrate in reverse phases along the first axis. The drive vibrator and the detection vibrator vibrating alternately repeat approaching and separating from each other along the first axis.


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