The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2021
Filed:
Mar. 09, 2017
Kurita Water Industries Ltd., Tokyo, JP;
Yuuichi Ogawa, Tokyo, JP;
KURITA WATER INDUSTRIES LTD., Tokyo, JP;
Abstract
An ammonia solution production device produces a dilute ammonia solution by supplying ammonia from an ammonia supply device to ultrapure water supplied from an ultrapure water production device and dissolving the ammonia, and supplies the ammonia solution to a use point. Here, the ultrapure water production device has the ability to supply ultrapure water having a resistance value of 18 MΩ·cm or more, and a metal ion concentration of 1 ng/L or less, particularly 0.1 ng/L or less. Ammonia is added to the ultrapure water from the ammonia supply device to produce the dilute ammonia water. The ammonia solution production device is suitable for the production of dilute ammonia water having an ammonia concentration of 100 mg/L or less. Such an ammonia solution production device is capable of producing an ammonia solution with a stable concentration, and achieves excellent follow-up performance with respect to a change in the concentration.