The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 24, 2021

Filed:

Mar. 21, 2016
Applicants:

Jun HU, San Bruno, CA (US);

Zhiyun Luo, San Jose, CA (US);

Fei Wang, San Jose, CA (US);

Inventors:

Jun Hu, San Bruno, CA (US);

Zhiyun Luo, San Jose, CA (US);

Fei Wang, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/78 (2006.01); H01L 21/266 (2006.01); H01L 21/761 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0623 (2013.01); H01L 21/266 (2013.01); H01L 21/761 (2013.01); H01L 29/7811 (2013.01); H01L 29/7823 (2013.01);
Abstract

This invention discloses a semiconductor power device formed on a semiconductor substrate comprises an active cell area and a termination area disposed near edges of the semiconductor substrate. The termination area comprises a plurality of duplicated units wherein each unit includes at least two trenches filled with a conductive trench material having a mesa area between adjacent trenches wherein the trenches and the mesa areas within each of the duplicated units are electrically shunt together. In the termination area each of the trenches in the duplicated units has a buried guard ring dopant region disposed below a bottom surface of the trenches.


Find Patent Forward Citations

Loading…