The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2021
Filed:
Mar. 21, 2016
Applicant:
Samsung Display Co., Ltd., Yongin, KR;
Inventors:
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/50 (2006.01); H05H 1/24 (2006.01); C23C 16/509 (2006.01); C23C 16/54 (2006.01); H01L 27/32 (2006.01); C23C 16/44 (2006.01); C23C 16/452 (2006.01); C23C 16/455 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
H01L 27/32 (2013.01); C23C 16/4401 (2013.01); C23C 16/452 (2013.01); C23C 16/45542 (2013.01); C23C 16/45551 (2013.01); C23C 16/50 (2013.01); C23C 16/509 (2013.01); C23C 16/54 (2013.01); H01J 37/3244 (2013.01); H01J 37/3255 (2013.01); H01J 37/32357 (2013.01); H01J 37/32467 (2013.01); H01J 37/32513 (2013.01); H01J 37/32541 (2013.01); H01J 37/32559 (2013.01); H01J 37/32834 (2013.01); H05H 1/2406 (2013.01); H01L 51/56 (2013.01); H05H 2001/2418 (2013.01); H05H 2001/2431 (2013.01);
Abstract
Provided is a vapor deposition apparatus including: a plasma generator configured to change at least a portion of a first raw material gas into a radical form; a corresponding surface corresponding to the plasma generator; a reaction space between the plasma generator and the corresponding surface; and an insulating member separated from, and surrounding the plasma generator.