The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2021
Filed:
Aug. 08, 2018
United States of America As Represented BY the Administrator of Nasa, Washington, DC (US);
Ari D. Brown, Ellicott City, MD (US);
Joseph Oxborrow, Glen Burnie, MD (US);
Vilem Mikula, Washington, DC (US);
Kevin L. Denis, Crofton, MD (US);
Timothy M. Miller, Silver Spring, MD (US);
United States of America as represented by the Administrator of NASA, Washington, DC (US);
Abstract
The disclosed subject matter relates to techniques, laminates and devices used to fabricate thin dielectric or semiconductor membranes including a handling substrate including a photoresist material on a first surface thereof, a semiconductor wafer having a circuit pattern on a first surface and a second surface to be processed and a temporary adhesive layer temporarily bonding the first surface of the semiconductor wafer to the first surface of the handling substrate including the photoresist material.