The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2021
Filed:
Sep. 10, 2019
Applicant:
Exogenesis Corporation, Billerica, MA (US);
Inventor:
Allen R. Kirkpatrick, Carlisle, MA (US);
Assignee:
Exogenesis Corporation, Billerica, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/263 (2006.01); H01J 37/147 (2006.01); H01J 37/305 (2006.01);
U.S. Cl.
CPC ...
H01L 21/2633 (2013.01); H01J 37/1472 (2013.01); H01J 37/3053 (2013.01); H01J 2237/022 (2013.01); H01J 2237/0473 (2013.01); H01J 2237/082 (2013.01);
Abstract
An improved ANAB system or process substantially or fully eliminating contaminant particles from reaching a beam target by adding to the usual primary (first) ionizer of the ANAB system or process an additional (second) ionizer to ionize contaminant particles and means to block or retard the ionized particles to prevent their reaching the beam target.
Quick Actions:
Kirkpatrick, Allen. (2021). Method and apparatus to eliminate contaminant particles from an accelerated neutral atom beam and thereby protect a beam target (U.S. Patent No. 11101134). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11101134
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile