The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2021
Filed:
Jul. 02, 2018
Canon Kabushiki Kaisha, Tokyo, JP;
Atsushi Kimura, Saitama, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides an imprint apparatus which forms a pattern of an imprint material on a substrate by using a mold, the apparatus comprising: a driver configured to drive the mold and the substrate relatively; a measurement device configured to measure a relative position between the mold and the substrate; and a controller configured to, in alignment between the mold and the substrate, control the driver based on a signal obtained by combining, with a first signal according to a deviation between the relative position measured by the measurement device and a target relative position, second signals with time intervals therebetween and that momentarily increase a driving force of the driver.