The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 24, 2021

Filed:

Jul. 10, 2019
Applicant:

Integrated Device Technology, Inc., San Jose, CA (US);

Inventors:

Gentjan Qama, Munich, DE;

Marco Nicolò, Munich, DE;

L'ubomir Fenic, Munich, DE;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01D 5/20 (2006.01); G01R 1/00 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
G01D 5/2053 (2013.01);
Abstract

An accurate position sensor is presented. The sensor operates over 360-degree motion angular motion and includes a coil structure formed on a substrate and a target mounted to be angularly moved over the coil structure, the target being formed of a conducting material in a shape of a spiral of Archimedes. The coil structure includes coils with an arc sufficient to operate over a 360 degree motion of the target, for example between 120 degrees and 360 degrees. Some embodiments include coils with a 180 degree arc. A method of operating the position sensor includes rotating a target formed of a conducting material in a shape of a spiral of Archimedes over a coil structure and providing a linearized and calibrated response indicating the angular position of the target relative to the coil structure.


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