The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2021
Filed:
May. 09, 2019
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Yasushi Takai, Echizen, JP;
Noriaki Hamaya, Echizen, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C 4/11 (2016.01); C09D 7/40 (2018.01); C23C 4/134 (2016.01); C09D 1/00 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); C08K 3/16 (2006.01);
U.S. Cl.
CPC ...
C23C 4/11 (2016.01); C09D 1/00 (2013.01); C09D 7/69 (2018.01); C23C 4/134 (2016.01); H01J 37/32495 (2013.01); H01L 21/67069 (2013.01); C08K 3/16 (2013.01);
Abstract
An yttrium fluoride spray material contains YOFand YF, and has an average particle size of 10-60 μm and a bulk density of 1.2-2.5 g/cm. The YOFand YFin the yttrium fluoride spray material consist of 30 to 90% by weight of YOFand the balance of YF. A sprayed coating of yttrium oxyfluoride is obtained by atmospheric plasma spraying of the spray material.