The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2021
Filed:
Jul. 10, 2020
Applicant:
Nikon Corporation, Tokyo, JP;
Inventor:
Hideaki Hara, Kumagaya, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 11/00 (2006.01); G03F 7/20 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); B25J 15/06 (2006.01);
U.S. Cl.
CPC ...
B25J 11/0095 (2013.01); B25J 15/0616 (2013.01); G03F 7/7075 (2013.01); G03F 7/70716 (2013.01); G03F 7/70783 (2013.01); H01L 21/67259 (2013.01); H01L 21/67288 (2013.01); H01L 21/681 (2013.01); H01L 21/6838 (2013.01); H01L 21/68778 (2013.01);
Abstract
A carrier system and method carries a plate-like object to an object mounting section. The system imparts vibration to the object that has been moved such that the object is vibrating when the object is placed onto the mounting section.