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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11097320 B1

PDFFull Text
Date of Patent:
Aug. 24, 2021

Filed:

Feb. 08, 2019

Foup cleaning device and foup cleaning method

Applicant:

Sti Co., Ltd., Anseong-si, KR;

Inventors:

Young Soo Park, Anseong-si, KR;

Oh Hyeong Kweon, Anseong-si, KR;

Dong Keun Jung, Anseong-si, KR;

Dong Geun Hur, Anseong-si, KR;

Assignee:

STI CO., LTD., Anseong-si, KR;

Attorney:

Stein IP, LLC

Primary Examiner:

Douglas Lee

Int. Cl.
CPC ...
B08B 9/08 (2006.01); B08B 9/20 (2006.01); H01L 21/673 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); B08B 3/10 (2006.01); B08B 5/04 (2006.01);
U.S. Cl.
CPC ...
B08B 9/0861 (2013.01); B08B 3/10 (2013.01); B08B 5/04 (2013.01); B08B 9/0826 (2013.01); B08B 9/205 (2013.01); H01L 21/67028 (2013.01); H01L 21/67034 (2013.01); H01L 21/67051 (2013.01); H01L 21/67389 (2013.01); H01L 21/67769 (2013.01); B08B 2203/007 (2013.01); B08B 2209/08 (2013.01); B08B 2230/01 (2013.01);
Abstract

An embodiment of the present subject matter including a FOUP body and a FOUP cover includes: a loading and unloading part configured to load or unload the FOUP; a standby part which is provided at one side of the loading and unloading part and on which the FOUP body and the FOUP cover are separated from or coupled to each other; a cleaning chamber configured to clean the FOUP body and the FOUP cover using steam; and a robot configured to transport the FOUP body and the FOUP cover between the standby part and the cleaning chamber.

Find Patent Forward Citations

Park, Young. (2021). Foup cleaning device and foup cleaning method (U.S. Patent No. 11097320). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11097320

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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