The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2021
Filed:
Sep. 11, 2019
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Taehoi Park, Suwon-si, KR;
Sangjin Kim, Suwon-si, KR;
Nakhee Seong, Suwon-si, KR;
Woojeong Shin, Suwon-si, KR;
Taehwan Oh, Suwon-si, KR;
Kwangsub Yoon, Suwon-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 35/26 (2006.01); B01D 36/00 (2006.01); G03F 7/16 (2006.01);
U.S. Cl.
CPC ...
B01D 35/26 (2013.01); B01D 36/001 (2013.01); G03F 7/16 (2013.01);
Abstract
A resist coating apparatus including a resist supplying system; a resist filtering system having a first filter, a second filter, and a pump between the first filter and the second filter; and a resist dispensing system, wherein the first filter includes a plurality of first unit filters connected in parallel.