The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2021
Filed:
Jun. 10, 2016
Applicant:
Japan Science and Technology Agency, Kawaguchi, JP;
Inventors:
Hideo Hosono, Meguro-ku, JP;
Yoshitake Toda, Meguro-ku, JP;
Toshinari Watanabe, Chiyoda-ku, JP;
Naomichi Miyakawa, Chiyoda-ku, JP;
Kazuhiro Ito, Chiyoda-ku, JP;
Satoru Watanabe, Chiyoda-ku, JP;
Akira Mitsui, Chiyoda-ku, JP;
Kazuto Ohkoshi, Chiyoda-ku, JP;
Assignee:
JAPAN SCIENCE AND TECHNOLOGY AGENCY, Kawaguchi, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/50 (2006.01); H01L 51/44 (2006.01); H01L 51/42 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
H01L 51/5072 (2013.01); H01L 51/4273 (2013.01); H01L 51/5092 (2013.01); H01L 51/5096 (2013.01); H01L 51/0081 (2013.01); H01L 51/0085 (2013.01); H01L 51/44 (2013.01); H01L 2251/303 (2013.01); H01L 2251/5353 (2013.01); Y02E 10/549 (2013.01);
Abstract
A thin film of amorphous metal oxide includes zinc (Zn), silicon (Si) and oxygen (O), the atomic ratio of Zn/(Zn+Si) being 0.30 to 0.95.