The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 17, 2021

Filed:

May. 01, 2019
Applicants:

Csi Cells Co., Ltd., Suzhou, CN;

Csi Solar Power Group Co., Ltd., Suzhou, CN;

Inventors:

Shuai Zou, Suzhou, CN;

Xiaoya Ye, Suzhou, CN;

Fang Cao, Suzhou, CN;

Xusheng Wang, Suzhou, CN;

Guoqiang Xing, Suzhou, CN;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/02 (2006.01); H01L 31/0236 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01L 31/02363 (2013.01); H01L 21/30604 (2013.01); H01L 31/02008 (2013.01);
Abstract

The present disclosure relates to a method for preparing nano-textured surface on single side of a silicon wafer, including the following steps: (1) superimposing two silicon wafers to obtain a first silicon wafer superimposition structure; the side on which the silicon wafers is superimposed is recorded as an attached surface, and the side exposed outside is recorded as an exposed surface; and (2) performing nano-textured surface etching on the first silicon wafer superimposition structure; and providing each silicon wafer with nano-textured surface on the exposed surface and a nano-textured surface etched strip on the edge of the attached surface. In the present disclosure, while the nano-textured surface etching is performed, the edge of the attached surface is etched with nano-textured surface by selecting a specific etching rate, which reduces the pulling force for detaching the wafers and reduces the fragmentation rate during the detaching process.


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