The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 17, 2021

Filed:

Dec. 23, 2019
Applicant:

Imec Vzw, Leuven, BE;

Inventors:

Stefaan Decoutere, Haasrode, BE;

Steve Stoffels, Haasrode, BE;

Assignee:

IMEC VZW, Leuven, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/522 (2006.01); H01L 21/768 (2006.01); H01L 23/48 (2006.01); H01L 23/64 (2006.01); H01L 29/20 (2006.01); H01L 21/8258 (2006.01); H01L 27/06 (2006.01); H01L 23/367 (2006.01); H01L 23/528 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5227 (2013.01); H01L 21/76895 (2013.01); H01L 23/367 (2013.01); H01L 23/481 (2013.01); H01L 23/528 (2013.01); H01L 23/645 (2013.01); H01L 29/2003 (2013.01);
Abstract

A three-dimensional (3D) power device having a plurality of layers that are stacked on top of each other and insulated from each other by interlayers, the plurality of layers comprising a lower layer comprising electrical and thermal conductors; a group III-Nitride based device layer formed above the lower layer, the group III-Nitride based device layer comprising at least one group III-Nitride based power device; a control layer formed above the group III-Nitride based device layer, the control layer comprising at least one control device; and a redistribution layer in between the group III-Nitride based device layer and the control layer, the current redistribution layer comprising a metal pattern being provided for laterally redistributing electrical currents and/or heat.


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