The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 17, 2021

Filed:

Jan. 10, 2017
Applicant:

Mitsubishi Gas Chemical Company, Inc., Chiyoda-ku, JP;

Inventors:

Suguru Haraki, Tokyo, JP;

Kenji Shimada, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C09D 7/65 (2018.01); C09D 7/63 (2018.01); C09D 5/00 (2006.01); C09D 5/16 (2006.01); C09K 3/18 (2006.01); G03F 7/40 (2006.01); H01L 21/321 (2006.01); H01L 21/3105 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02057 (2013.01); C09D 5/00 (2013.01); C09D 5/16 (2013.01); C09D 7/63 (2018.01); C09D 7/65 (2018.01); C09K 3/18 (2013.01); G03F 7/40 (2013.01); H01L 21/02118 (2013.01); H01L 21/02282 (2013.01); H01L 21/3105 (2013.01); H01L 21/321 (2013.01);
Abstract

A liquid composition for imparting alcohol-repellency to a semiconductor substrate material and a method for treating a semiconductor substrate surface using the liquid composition, are disclosed. The liquid composition contains: a surfactant (A) having a substituent of formula (1) (where n is an integer of 3 to 20), and an anionic hydrophilic group; and a compound (B) being selected from the group consisting of compounds having a polyethylenimine and a substituent of formula (2) or formula (3) (where R, R, Rand Rare each independently hydrogen or a C1-6 alkyl, alkenyl, alkynyl, or aryl, and Xis a fluoride ion, a chloride ion, a bromide ion, an iodide ion, a fluoroborate ion, a phosphate ion, an acetate ion, a trifluoroacetate ion, a sulfate ion, a hydrogen sulfate ion, a methane sulfate ion, a hydroxide ion, a perchlorate ion, or a nitrate ion).


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