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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11094504 B1

PDFFull Text
Date of Patent:
Aug. 17, 2021

Filed:

Jan. 06, 2020

Resonator coil having an asymmetrical profile

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Costel Biloiu, Rockport, MA (US);

Michael Honan, Peabody, MA (US);

Robert B Vopat, Austin, TX (US);

David Blahnik, Round Rock, TX (US);

Charles T. Carlson, Cedar Park, TX (US);

Frank Sinclair, Boston, MA (US);

Paul Murphy, Reading, MA (US);

Assignee:

APPLIED Materials, Inc., Santa Clara, CA (US);

Attorney:

Kacvinsky Daisak Bluni PLLC

Primary Examiner:

Kiet T Nguyen

Int. Cl.
CPC ...
H01J 37/30 (2006.01); H01J 37/317 (2006.01); H01J 23/213 (2006.01); H01J 23/18 (2006.01); H01J 25/02 (2006.01); H01J 25/58 (2006.01); H01J 37/32 (2006.01); H01P 7/00 (2006.01); H01P 7/08 (2006.01); H01P 7/06 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3007 (2013.01); H01J 23/18 (2013.01); H01J 23/213 (2013.01); H01J 25/02 (2013.01); H01J 25/58 (2013.01); H01J 37/3171 (2013.01); H01J 37/32247 (2013.01); H01J 37/32284 (2013.01); H01P 7/00 (2013.01); H01P 7/005 (2013.01); H01P 7/06 (2013.01); H01P 7/08 (2013.01); H01J 2237/0473 (2013.01);
Abstract

Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

Find Patent Forward Citations

Biloiu, Costel. (2021). Resonator coil having an asymmetrical profile (U.S. Patent No. 11094504). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11094504

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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