The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2021
Filed:
Dec. 18, 2018
Applicants:
Samsung Electronics Co., Ltd., Suwon-si, KR;
The Regents of the University of California, Oakland, CA (US);
Inventors:
Assignee:
Samsung Electronics Co., Ltd., Suwon-s, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/552 (2014.01); H01L 31/0232 (2014.01); H01L 21/24 (2006.01); H01L 31/0392 (2006.01); H01L 31/028 (2006.01);
U.S. Cl.
CPC ...
G01N 21/553 (2013.01); H01L 21/24 (2013.01); H01L 31/0232 (2013.01); H01L 31/028 (2013.01); H01L 31/03921 (2013.01);
Abstract
Provided are spectrometers utilizing surface plasmons and surface plasmon resonance. The spectrometer includes a substrate including a region having a permittivity slope (varying permittivity), a dielectric spacer configured to correspond to the region having a permittivity slope, and a detector configured to face the region having a permittivity slope with the dielectric spacer therebetween. The region having a permittivity slope includes a region having a dopant concentration slope (varying concentration).