The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 17, 2021

Filed:

Oct. 12, 2017
Applicant:

Fujikin Incorporated, Osaka, JP;

Inventor:

Hidehiro Doya, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/52 (2006.01); C23C 16/455 (2006.01); H01L 21/02 (2006.01); F16K 27/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C23C 16/45527 (2013.01); C23C 16/45544 (2013.01); C23C 16/45561 (2013.01); F16K 27/00 (2013.01); H01L 21/02 (2013.01); H01L 21/0262 (2013.01); H01L 21/6715 (2013.01); H01L 21/67017 (2013.01); H01L 21/67253 (2013.01);
Abstract

A fluid control system is provided which, without reducing the supply flow rate of a fluid, is considerably more miniaturized and integrated. This fluid control system includes base blocks and fluid devices respectively installed on upper surfaces of the base blocks. The base blocks each include protruding pipe parts protruding in a longitudinal direction. The protruding pipe parts each communicate with a corresponding second flow path. The protruding pipe part on a downstream side end surface of the base block and the protruding pipe part on an upstream side end surface of the base block are air-tightly or liquid-tightly connected to each other by a welding material.


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