The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2021
Filed:
Jun. 25, 2020
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Kenichi Kurokawa, Suwa, JP;
Yukio Kitahara, Chino, JP;
Takashi Yamazaki, Shiojiri, JP;
Akihiko Ebina, Fujimi, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03B 5/32 (2006.01); H01L 41/047 (2006.01); H03H 9/15 (2006.01);
U.S. Cl.
CPC ...
H03B 5/32 (2013.01); H01L 41/0472 (2013.01); H01L 41/0477 (2013.01); H03H 9/15 (2013.01);
Abstract
A vibration element includes: a base; an arm continuous with the base; a first electrode that includes a first layer of titanium nitride and a second layer containing nitrogen, titanium, and oxygen, and is disposed on the arm; an aluminum nitride layer in contact with the second layer; and a second electrode disposed on the aluminum nitride layer.