The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2021
Filed:
Nov. 19, 2019
Applicant:
Fujitsu Limited, Kawasaki, JP;
Inventors:
Shirou Ozaki, Yamato, JP;
Toshihiro Ohki, Hadano, JP;
Assignee:
FUJITSU LIMITED, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01); H01L 21/336 (2006.01); H01L 23/31 (2006.01); H01L 29/778 (2006.01); H01L 29/205 (2006.01); H01L 29/20 (2006.01); H03F 3/21 (2006.01); H01L 23/373 (2006.01); H01L 21/02 (2006.01); H01L 21/28 (2006.01); H01L 29/51 (2006.01);
U.S. Cl.
CPC ...
H01L 23/3171 (2013.01); H01L 21/02115 (2013.01); H01L 21/02186 (2013.01); H01L 21/28264 (2013.01); H01L 23/3732 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 29/517 (2013.01); H01L 29/7786 (2013.01); H03F 3/21 (2013.01);
Abstract
A compound semiconductor device includes a compound semiconductor stack structure, a protective film provided on the compound semiconductor stack structure and containing titanium oxide, and a polycrystalline diamond film provided on the protective film.