The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2021
Filed:
Aug. 16, 2019
Seiko Epson Corporation, Tokyo, JP;
Kazuyuki Nagata, Minowa-machi, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A physical quantity sensor includes: a substrate; a movable object disposed displaceably with respect to the substrate; an electrode provided at a position facing the movable object on the substrate; an anchor portion fixing the movable object to the substrate; and a beam that is a rotation shaft of the movable object and connects the anchor portion and the movable object to each other, in which the movable object includes a first mass portion provided at one side of the beam, and a second mass portion provided at the other side of the beam, a first spring provided between the first mass portion and the beam, and a second spring provided between the second mass portion and the beam.