The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 10, 2021

Filed:

Sep. 19, 2018
Applicant:

Hamamatsu Photonics K.k., Hamamatsu, JP;

Inventors:

Munenori Takumi, Hamamatsu, JP;

Haruyoshi Toyoda, Hamamatsu, JP;

Yoshinori Matsui, Hamamatsu, JP;

Kazutaka Suzuki, Hamamatsu, JP;

Kazuhiro Nakamura, Hamamatsu, JP;

Keisuke Uchida, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONIC K.K., Hamamatsu, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01); G01B 11/00 (2006.01); H01L 27/144 (2006.01); H01L 31/02 (2006.01); H01L 31/0216 (2014.01); G01J 1/02 (2006.01); G01B 11/25 (2006.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
G01B 11/24 (2013.01); G01B 11/002 (2013.01); G01B 11/25 (2013.01); G01J 1/02 (2013.01); H01L 27/1446 (2013.01); H01L 27/14603 (2013.01); H01L 27/14605 (2013.01); H01L 27/14623 (2013.01); H01L 31/02024 (2013.01); H01L 31/02164 (2013.01); H01L 31/02165 (2013.01);
Abstract

Provided is a shape measurement sensor including a light-receiving unit and a calculation unit. The light-receiving unit includes a plurality of pixel pairs. Each of the pixel pairs includes a first pixel and a second pixel that is disposed side by side with the first pixel along a first direction. In the first pixel, as an incident position is closer to one end of the light-receiving unit in a second direction, an intensity of a first electric signals decreases. In the second pixel, as the incident position is closer to the one end, an intensity of a second electric signal increases. The calculation unit calculates the incident position in the second direction for each of the pixel pairs on the basis of the intensity of the first electric signal and the intensity of the acquired second electric signal.


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