The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2021
Filed:
Nov. 15, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Joseph Yudovsky, Campbell, CA (US);
Alexander S. Polyak, Palm Coast, FL (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); C30B 25/10 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/46 (2006.01); C30B 25/12 (2006.01);
U.S. Cl.
CPC ...
C30B 25/10 (2013.01); C23C 16/4586 (2013.01); C23C 16/45546 (2013.01); C23C 16/46 (2013.01); C30B 25/12 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/67161 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01); C23C 16/4584 (2013.01); C23C 16/45548 (2013.01);
Abstract
Susceptor assemblies comprising a susceptor with a top surface with a plurality of recesses and a bottom surface are described. A heater is positioned below the susceptor to heat the susceptor. A shield is positioned between the bottom surface of the susceptor and the heater. The shield increases deposition uniformity across the susceptor.