The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2021
Filed:
Oct. 28, 2011
Applicants:
Mark Hawkins, Gilbert, AZ (US);
Matthew G. Goodman, Chandler, AZ (US);
Shawn Thomas, Gilbert, AZ (US);
Inventors:
Mark Hawkins, Gilbert, AZ (US);
Matthew G. Goodman, Chandler, AZ (US);
Shawn Thomas, Gilbert, AZ (US);
Assignee:
ASM IP HOLDING B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H01L 21/687 (2006.01); C23C 16/458 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45521 (2013.01); C23C 16/458 (2013.01); C23C 16/4582 (2013.01); C23C 16/4583 (2013.01); C23C 16/4585 (2013.01); H01L 21/6875 (2013.01); H01L 21/68735 (2013.01); H01L 21/67115 (2013.01);
Abstract
A susceptor including a generally circular body having a face with a radially inward section and a radially outward section proximate a circumference of the body, the radially outward section having at least one ring extending upward for contacting a bottom surface of a substrate, and wherein the radially inward section lacks a ring extending upward from the face.