The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 03, 2021

Filed:

Nov. 13, 2020
Applicant:

Ngk Insulators, Ltd., Nagoya, JP;

Inventors:

Yuji Hori, Owariasahi, JP;

Tatsuro Takagaki, Nagoya, JP;

Assignee:

NGK INSULATORS, LTD., Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H01L 41/312 (2013.01); H03H 9/25 (2006.01); H01L 41/337 (2013.01); H01L 41/187 (2006.01); C30B 33/06 (2006.01); C23C 14/10 (2006.01); C23C 14/08 (2006.01); C30B 29/30 (2006.01); H01L 41/313 (2013.01);
U.S. Cl.
CPC ...
H03H 9/02574 (2013.01); C23C 14/08 (2013.01); C23C 14/10 (2013.01); C30B 29/30 (2013.01); C30B 33/06 (2013.01); H01L 41/187 (2013.01); H01L 41/312 (2013.01); H01L 41/313 (2013.01); H01L 41/337 (2013.01); H03H 9/02559 (2013.01); H03H 9/02897 (2013.01); H03H 9/25 (2013.01); H03H 9/02834 (2013.01);
Abstract

A bonded body includes a supporting substrate; a piezoelectric material substrate composed of a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate; and a bonding layer bonding the supporting substrate and the piezoelectric material substrate and contacting a main surface of the piezoelectric material substrate. The bonding layer includes a void extending from the piezoelectric material substrate toward the supporting substrate. A ratio (t/t) of a width tat an end of the void on a side of the supporting substrate with respect to a width tat an end of the void on a side of the piezoelectric material substrate is 0.8 or lower.


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