The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2021
Filed:
Jul. 18, 2020
Ceos Corrected Electron Optical Systems Gmbh, Heidelberg, DE;
Stephan Uhlemann, Heidelberg, DE;
CEOS Corrected Electron Optical Systems GmbH, Heidelberg, DE;
Abstract
A corrector has a strength of a central hexapole field (Ψ) which is selected such that the threefold axial astigmatism (A) vanishes and the strengths of two equal outer hexapole fields (Ψ) are selected such that the overall corrector () does not have a sixfold axial astigmatism (A). The length (L) of the central multipole element () in relation to the lengths (L') of the multipole elements (and) is chosen such that the axial three-lobed aberration of sixth order (D) vanishes. A separation between the outer multipole elements (and) and round lenses (″) further spaced apart from a symmetry plane () of the corrector corresponds to the focal length (f′) of those round lenses (″) plus an additional separation (Δz) which is chosen such that the axial three-lobed aberration of fourth order (D) vanishes for the given lengths L and L′.