The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2021
Filed:
May. 13, 2020
Dexerials Corporation, Tokyo, JP;
Asahiko Nogami, Tokyo, JP;
Dexerials Corporation, Tokyo, JP;
Abstract
An exposure apparatusincludes an optical pickupconfigured to emit laser light and being capable of adjusting the focus of the laser light, a control computing unitconfigured to adjust the focus of the laser light, an auxiliary stagehaving the light source unitset thereon, the position of the auxiliary stagebeing adjustable in the direction toward the master, an auxiliary stage control unitconfigured to control the position of the auxiliary stage, wherein the optical pickupincludes an object lensconfigured to direct the laser light to the master, a VCM actuatorconfigured to displace the object lensin accordance with a drive current, and the auxiliary stage control unitcontrols the position of the auxiliary stagein accordance with the drive current for the VCM actuator